Lithography for advanced packaging is different from lithography for front end wafer processing. The requirements involved are special and varying. The resist films range from thin to thick. Kulicke & Soffa developed the Liteq 500, a wafer stepper that is flexible and can effectively deal with all these variations and specific needs.
Sioux designed, implemented and tested the complete software stack for the Liteq 500, including:
The first stepper is operational, commercial machines are now being sold.
Windows 8, Microsoft .NET 4.5, WCF, C#, 64 bit, ASD, ESP, STM32 and C++.
Kulicke & Soffa Liteq is the first company to develop a dedicated Lithography solution for the Advanced Packaging market. K&S Liteq provides an innovative and cost-effective wafer stepper addressing current and future requirements.